Technical intake
Enough detail to assess the route—without exposing the process.
The first review should use non-confidential component and interface information. Sensitive process data is not required at the public intake stage.
| Wafer platform | 200 mm / 300 mm or other evidence-backed platform |
|---|---|
| CMP tool family | Family-level identification is enough for the initial review |
| Carrier-head family | Family-level identification; avoid confidential internal geometry |
| Ring construction | Full polymer / bonded / insert / composite |
| Material family | PEEK / PPS / PET / other evidence-backed engineering polymer |
| Core dimensions | OD / ID / thickness |
| Functional geometry | Groove count, groove orientation and other non-confidential features |
| Reference basis | Drawing available / physical sample available / non-confidential specification |
| Inspection | Dimensional inspection points and first-piece expectations |
| Traceability | Material certificate / lot traceability requirement |
| Packaging | Cleanliness and packaging requirement |
| Qualification lot | Initial qualification quantity; commercial MOQ remains open until confirmed |
Qualification boundary: dimensional or material feasibility does not equal OEM approval, guaranteed fit, guaranteed lifetime or guaranteed CMP performance.